Inventor · disambiguated record
Vincent Szeto
Also filed as: SZETO VINCENT
0 granted patents·3 pending applications·0 citations·filing 2024–2025
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
3 records- 0165US2025253125A1System and method for managing solid phase precursors for an ion implantation systemAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0257US2025385118A1Dual force lift and ground pins for electrostatic chuck and method for use thereofAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0353US2025279297A1Variable vent pressure and flow for flushing loadlock chamberAXCELIS TECH INC·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →