Inventor · disambiguated record
Waltraud Herbst
Also filed as: HERBST WALTRAUD
8 granted patents·2 pending applications·349 citations·filing 1998–2005
85Inventor score
Top patents by PatentIndex Score
10 records- 0196US6893972B2Process for sidewall amplification of resist structures and for the production of structures having reduced structure sizeINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 17, 2005·280 cites·12 claims
- 0262US6770423B2Negative resist process with simultaneous development and silylationINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 3, 2004·7 cites·8 claims
- 0358US7078709B2Apparatus and method for proof of outgassing productsINFINEON TECHNOLOGIES AG·Filed 2004·Granted Jul 18, 2006·3 cites·18 claims
- 0455US6582888B1Method for producing organic electroluminescent componentsSIEMENS AG·Filed 1998·Granted Jun 24, 2003·54 cites·37 claims
- 0551US7052820B2Silicon-containing resist for photolithographyINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 30, 2006·3 cites·10 claims
- 0637US2006105274A1Method for forming a lithography maskKRAGLER KARL·Filed 2005·Application pending·0 cites
- 0735US7018784B2Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarityINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 28, 2006·0 cites·19 claims
- 0835US6759184B2Amplification of resist structures of fluorinated resist polymers by structural growth of the structures by targeted chemical bonding of fluorinated oligomersINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jul 6, 2004·2 cites·12 claims
- 0935US2005109954A1Apparatus and method for verification of outgassing productsFiled 2004·Application pending·0 cites
- 1034US7033740B2Photoresists with reaction anchors for chemical consolidation of resist structures for exposures at 157 nmINFINEON TECHNOLOGIES AG·Filed 2002·Granted Apr 25, 2006·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →