Inventor · disambiguated record
Wei-Shin Cheng
Also filed as: CHENG WEI-SHIN
19 granted patents·7 pending applications·16 citations·filing 2019–2025
90Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD26
Top patents by PatentIndex Score
26 records- 0197US11470710B2EUV light source and apparatus for EUV lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 11, 2022·3 cites·20 claims
- 0294US11553581B2Radiation source apparatus and method for using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 10, 2023·2 cites·20 claims
- 0393US11809083B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0493US11533799B1System and method for supplying target material in an EUV light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 20, 2022·2 cites·20 claims
- 0590US10670970B1Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 2, 2020·3 cites·20 claims
- 0689US10880980B2EUV light source and apparatus for EUV lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·2 cites·20 claims
- 0787US12066761B2Inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 20, 2024·1 cites·20 claims
- 0887US2025362615A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0986US11528797B2Method and system for generating droplets for EUV photolithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 13, 2022·1 cites·20 claims
- 1085US2025321500A1System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1181US2024361701A1Novel design of an inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1279US2024324090A1Methods of generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1378US12028959B2EUV light source and apparatus for EUV lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 2, 2024·0 cites·20 claims
- 1476US12372880B2System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 29, 2025·0 cites·20 claims
- 1575US2024365460A1Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1675US2024365461A1Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1774US12235586B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1873US12096543B2Method for using radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 1972US12167526B2Method and system for generating droplets for EUV photolithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·20 claims
- 2068US12063734B2Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 13, 2024·0 cites·20 claims
- 2165US11537053B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 27, 2022·0 cites·20 claims
- 2262US11086225B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
- 2357US11134558B2Droplet generator assembly and method for using the same and radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 2455US11576250B1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 7, 2023·0 cites·20 claims
- 2554US11442365B1EUV photolithography system and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 13, 2022·0 cites·20 claims
- 2644US2023345610A1Method and apparatus for monitoring an extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →