Inventor · disambiguated record
Wei-Kay Chiu
Also filed as: CHIU WEI-KAY
13 granted patents·91 citations·filing 1996–2002
91Inventor score
Files withTAIWAN SEMICONDUCTOR MFG13
Top patents by PatentIndex Score
13 records- 0166US5858475AAcoustic wave enhanced spin coating methodTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jan 12, 1999·28 cites·7 claims
- 0257US5849582ABaking of photoresist on wafersTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Dec 15, 1998·14 cites·5 claims
- 0351US6908514B2Wafer alignment marks protected by photoresistTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jun 21, 2005·4 cites·6 claims
- 0446US6197481B1Wafer alignment marks protected by photoresistTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Mar 6, 2001·12 cites·4 claims
- 0544US6137088ABaking of photoresist on wafersTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Oct 24, 2000·7 cites·4 claims
- 0642US6019844AAcoustic wave enhanced spin coaterTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Feb 1, 2000·8 cites·2 claims
- 0740US5876875AAcoustic wave enhanced developerTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Mar 2, 1999·7 cites·4 claims
- 0838US6575645B2Method and apparatus for improving resist pattern developingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jun 10, 2003·2 cites·6 claims
- 0937US6010255AAcoustic wave enhanced developerTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jan 4, 2000·4 cites·7 claims
- 1036US6537734B2Method and apparatus for improving resist pattern developingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 25, 2003·0 cites·8 claims
- 1135US6355397B1Method and apparatus for improving resist pattern developingTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Mar 12, 2002·4 cites·12 claims
- 1229US6664194B1Photoexposure method for facilitating photoresist strippingTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 16, 2003·0 cites·34 claims
- 1326US5838162ATest apparatus and method for testing integrated circuit modules having visual displayTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 17, 1998·1 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →