Inventor · disambiguated record

Wen Zen Chiu

Also filed as: CHIU WEN ZEN

1 granted patent·13 citations·filing 1999–1999

35Inventor score

Technology areasG05B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0140US6577926B1Method of detecting and controlling in-situ faults in rapid thermal processing systemsTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jun 10, 2003·13 cites·14 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →