Inventor · disambiguated record
Wen-Hsiang Tang
Also filed as: TANG WEN-HSIANG
6 granted patents·166 citations·filing 1998–2002
85Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0182US6562696B1Method for forming an STI feature to avoid acidic etching of trench sidewallsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 13, 2003·46 cites·17 claims
- 0279US6156485AFilm scheme to solve high aspect ratio metal etch masking layer selectivity and improve photo I-line PR resolution capability in quarter-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 5, 2000·74 cites·26 claims
- 0353US6214739B1Method of metal etching with in-situ plasma cleaningTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Apr 10, 2001·18 cites·8 claims
- 0448US6267121B1Process to season and determine condition of a high density plasma etcherTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 31, 2001·14 cites·19 claims
- 0538US6063709ARemoval of SOG etchback residue by argon treatmentTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 16, 2000·8 cites·15 claims
- 0635US6642150B1Method for testing for blind hole formed in wafer layerTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Nov 4, 2003·6 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →