Inventor · disambiguated record
Wei-Chun Yen
Also filed as: YEN WEI-CHUN
8 granted patents·2 pending applications·12 citations·filing 2019–2025
80Inventor score
Top patents by PatentIndex Score
10 records- 0197US12007694B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 11, 2024·4 cites·20 claims
- 0290US10678138B2Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 9, 2020·4 cites·20 claims
- 0387US12066761B2Inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 20, 2024·1 cites·20 claims
- 0484US2025348005A1Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0582US10955752B2EUV radiation source apparatus for lithographyCHEN YU CHIH·Filed 2019·Granted Mar 23, 2021·3 cites·20 claims
- 0681US12449734B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 0781US2024361701A1Novel design of an inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0876US12510827B2EUV radiation source apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 30, 2025·0 cites·20 claims
- 0975US11513441B2EUV radiation source apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 29, 2022·0 cites·20 claims
- 1047US10955750B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 23, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →