Inventor · disambiguated record
William F. Beach
Also filed as: BEACH WILLIAM F
13 granted patents·829 citations·filing 1979–1997
95Inventor score
Files withSPECIALTY COATING SYSTEMS INC7ALPHA METALS2SPECIALTY COATING SYSETMS INC1UNION CARBIDE CHEM PLASTIC1UNION CARBIDE CORP1
Top patents by PatentIndex Score
13 records- 0194US5538758AMethod and apparatus for the deposition of parylene AF4 onto semiconductor wafersSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 23, 1996·142 cites·12 claims
- 0289US5879808AParylene polymer layersALPHA METALS·Filed 1997·Granted Mar 9, 1999·113 cites·54 claims
- 0389US5709753AParylene deposition apparatus including a heated and cooled dimer crucibleSPECIALTY COATING SYSETMS INC·Filed 1995·Granted Jan 20, 1998·103 cites·20 claims
- 0488US5536317AParylene deposition apparatus including a quartz crystal thickness/rate controllerSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 16, 1996·98 cites·9 claims
- 0588US5534068AParylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangementSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 9, 1996·81 cites·6 claims
- 0683US5556473AParylene deposition apparatus including dry vacuum pump system and downstream cold trapSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Sep 17, 1996·60 cites·2 claims
- 0783US5536319AParylene deposition apparatus including an atmospheric shroud and inert gas sourceSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 16, 1996·41 cites·16 claims
- 0878US4291244AElectretsUNION CARBIDE CORP·Filed 1979·Granted Sep 22, 1981·32 cites·8 claims
- 0976US5536321AParylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filterSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 16, 1996·47 cites·10 claims
- 1075US5536322AParylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping deviceSPECIALTY COATING SYSTEMS INC·Filed 1995·Granted Jul 16, 1996·42 cites·13 claims
- 1170US6051276AInternally heated pyrolysis zoneALPHA METALS·Filed 1997·Granted Apr 18, 2000·32 cites·50 claims
- 1267US5139813AMethod for inducing fluorescence in parylene films by an active plasmaUNION CARBIDE CHEM PLASTIC·Filed 1990·Granted Aug 18, 1992·24 cites·28 claims
- 1348US5806319AMethod and apparatus for cryogenically cooling a deposition chamberFiled 1997·Granted Sep 15, 1998·14 cites·53 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →