Inventor · disambiguated record
Willy Beinvogl
Also filed as: BEINVOGL WILLY
6 granted patents·114 citations·filing 1981–1987
84Inventor score
Files withSIEMENS AG6
Top patents by PatentIndex Score
6 records- 0166US4658496AMethod for manufacturing VLSI MOS-transistor circuitsSIEMENS AG·Filed 1985·Granted Apr 21, 1987·35 cites·11 claims
- 0265US4473436AMethod of producing structures from double layers of metal silicide and polysilicon on integrated circuit substrates by RIE utilizing SF6 and Cl2SIEMENS AG·Filed 1983·Granted Sep 25, 1984·27 cites·5 claims
- 0363US4380489AMethod of producing polysilicon structure in the 1 μm range on substrates containing integrated semiconductor circuits by plasma etchingSIEMENS AG·Filed 1982·Granted Apr 19, 1983·26 cites·6 claims
- 0447US4479850AMethod for etching integrated semiconductor circuits containing double layers consisting of polysilicon and metal silicideSIEMENS AG·Filed 1984·Granted Oct 30, 1984·14 cites·10 claims
- 0533US4360414AMethod of producing structures comprised of layers consisting of silicides or silicide-polysilicon by reactive sputter etchingSIEMENS AG·Filed 1981·Granted Nov 23, 1982·6 cites·8 claims
- 0632US4731343AMethod for manufacturing insulation separating the active regions of a VLSI CMOS circuitSIEMENS AG·Filed 1987·Granted Mar 15, 1988·6 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →