Inventor · disambiguated record
William D. Lee
Also filed as: LEE WILLIAM D · LEE WILLIAM DAVID
13 granted patents·3 pending applications·107 citations·filing 2005–2024
89Inventor score
Files withSTABLE LASER SYSTEMS INC4AXCELIS TECH INC3LEE WILLIAM D3LEE WILLIAM DAVID2RES ELECTRO OPTICS INC2
Top patents by PatentIndex Score
16 records- 0191US8422193B2Annulus clamping and backside gas cooled electrostatic chuckTAO TENG CHAO D·Filed 2006·Granted Apr 16, 2013·58 cites·25 claims
- 0290US7828929B2Methods and devices for monitoring and controlling thin film processingRES ELECTRO OPTICS INC·Filed 2005·Granted Nov 9, 2010·18 cites·41 claims
- 0386US8182861B2Methods and devices for monitoring and controlling thin film processingLEE WILLIAM DAVID·Filed 2010·Granted May 22, 2012·6 cites·41 claims
- 0483US7952851B2Wafer grounding method for electrostatic clampsAXCELIS TECH INC·Filed 2008·Granted May 31, 2011·10 cites·12 claims
- 0577US8270142B2De-clamping wafers from an electrostatic chuckLEE WILLIAM D·Filed 2008·Granted Sep 18, 2012·6 cites·18 claims
- 0675US9281227B2Multi-resistivity Johnsen-Rahbek electrostatic clampAXCELIS TECH INC·Filed 2013·Granted Mar 8, 2016·3 cites·19 claims
- 0765US7787505B1Multi-longitudinal mode laser providing polarization controlRES ELECTRO OPTICS INC·Filed 2007·Granted Aug 31, 2010·3 cites·57 claims
- 0863US2024332885A1Hybrid locking electronics for high-speed, high-precision locks to ultra-stable high finesse cavitiesSTABLE LASER SYSTEMS INC·Filed 2024·Application pending·0 cites
- 0962US9048276B2Matched coefficient of thermal expansion for an electrostatic chuckLEE WILLIAM D·Filed 2011·Granted Jun 2, 2015·1 cites·12 claims
- 1061US9036326B2Gas bearing electrostatic chuckLEE WILLIAM DAVID·Filed 2008·Granted May 19, 2015·2 cites·19 claims
- 1159US2023253753A1Laser frequency stabilizationSTABLE LASER SYSTEMS INC·Filed 2023·Application pending·0 cites
- 1258US12353001B2Fiber noise cancellationSTABLE LASER SYSTEMS INC·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 1353US8023247B2Electrostatic chuck with compliant coatAXCELIS TECH INC·Filed 2008·Granted Sep 20, 2011·0 cites·11 claims
- 1453US2024142764A1Getter vacuum pump to maintain vacuum pressure within a housing of a fabry-perot cavitySTABLE LASER SYSTEMS INC·Filed 2023·Application pending·0 cites
- 1548US8902560B2Electrostatic chuck ground punchSMITH DAVID B·Filed 2008·Granted Dec 2, 2014·0 cites·16 claims
- 1647US8241425B2Non-condensing thermos chuckLEE WILLIAM D·Filed 2009·Granted Aug 14, 2012·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →