Inventor · disambiguated record
Wilhelm Platow
Also filed as: PLATOW WILHELM
7 granted patents·1 pending application·1 citations·filing 2018–2025
70Inventor score
Files withAXCELIS TECH INC8
Top patents by PatentIndex Score
8 records- 0178US12431332B2High energy implanter with small footprintAXCELIS TECH INC·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 0272US12112918B2Dual source injector with switchable analyzing magnetAXCELIS TECH INC·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 0371US10573485B1Tetrode extraction apparatus for ion sourceAXCELIS TECH INC·Filed 2018·Granted Feb 25, 2020·1 cites·20 claims
- 0466US11244800B2Stepped indirectly heated cathode with improved shieldingAXCELIS TECH INC·Filed 2021·Granted Feb 8, 2022·0 cites·21 claims
- 0564US11823858B2Dual source injector with switchable analyzing magnetAXCELIS TECH INC·Filed 2022·Granted Nov 21, 2023·0 cites·20 claims
- 0655US11798775B2Extended lifetime dual indirectly-heated cathode ion sourceAXCELIS TECH INC·Filed 2021·Granted Oct 24, 2023·0 cites·20 claims
- 0754US2025323007A1Semiconductor radioactive wafer decay safety and operation systemAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0851US11545330B2Ion source with multiple bias electrodesAXCELIS TECH INC·Filed 2021·Granted Jan 3, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →