Inventor · disambiguated record
Woong Jae Chung
Also filed as: CHUNG WOONG JAE
7 granted patents·20 citations·filing 2006–2015
80Inventor score
Top patents by PatentIndex Score
7 records- 0181US8260449B2Photolithography systems and associated methods of overlay error correctionCHUNG WOONG JAE·Filed 2008·Granted Sep 4, 2012·7 cites·20 claims
- 0280US8313877B2Photolithography monitoring mark, photolithography mask comprising an exposure monitoring mark, and phase shift mask comprising an exposure monitoring markCHUNG WOONG JAE·Filed 2009·Granted Nov 20, 2012·7 cites·27 claims
- 0369US9817392B2Photolithography systems and associated methods of overlay error correctionMICRON TECHNOLOGY INC·Filed 2015·Granted Nov 14, 2017·1 cites·16 claims
- 0464US9195149B2Photolithography systems and associated methods of overlay error correctionCHUNG WOONG JAE·Filed 2012·Granted Nov 24, 2015·1 cites·20 claims
- 0564US9052604B2Photolithography systems and associated alignment correction methodsCHUNG WOONG JAE·Filed 2008·Granted Jun 9, 2015·2 cites·15 claims
- 0663US8203695B2Photolithography systems and associated methods of focus correctionCHUNG WOONG JAE·Filed 2008·Granted Jun 19, 2012·2 cites·14 claims
- 0742US7557444B2Power-via structure for integration in advanced logic/smart-power technologiesINFINEON TECHNOLOGIES AG·Filed 2006·Granted Jul 7, 2009·0 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →