Inventor · disambiguated record
Woo-Seok Ko
Also filed as: KO WOO SEOK
15 granted patents·3 pending applications·38 citations·filing 2009–2016
90Inventor score
Top patents by PatentIndex Score
18 records- 0187US10001444B2Surface inspecting methodSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 19, 2018·4 cites·19 claims
- 0287US9733178B2Spectral ellipsometry measurement and data analysis device and related systems and methodsSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Aug 15, 2017·3 cites·16 claims
- 0383US9934939B2Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 3, 2018·5 cites·13 claims
- 0483US9831626B2Broadband light source and optical inspector having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Nov 28, 2017·2 cites·17 claims
- 0581US8841824B2Broadband light illuminatorsSAMSUNG ELECTRONICS CO LTD·Filed 2012·Granted Sep 23, 2014·5 cites·20 claims
- 0679US9123503B2Methods of fabricating microelectronic substrate inspection equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Sep 1, 2015·3 cites·9 claims
- 0779US8034641B2Method for inspection of defects on a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2010·Granted Oct 11, 2011·5 cites·20 claims
- 0877US9261532B1Conductive atomic force microscope and method of operating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Feb 16, 2016·2 cites·20 claims
- 0973US10373796B2Method of inspecting wafer using electron beamSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Aug 6, 2019·2 cites·20 claims
- 1073US9455206B2Overlay measuring method and system, and method of manufacturing semiconductor device using the sameYUN SEONG-JIN·Filed 2015·Granted Sep 27, 2016·2 cites·10 claims
- 1168US7697130B2Apparatus and method for inspecting a surface of a waferSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Apr 13, 2010·3 cites·17 claims
- 1267US8729468B2Microelectronic substrate inspection equipment using helium ion microscopyKIM MIN-KOOK·Filed 2012·Granted May 20, 2014·2 cites·11 claims
- 1352US9255694B2Reflector structure of illumination optic systemSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Feb 9, 2016·0 cites·14 claims
- 1445US9417055B2Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin filmSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Aug 16, 2016·0 cites·20 claims
- 1544US2013214180A1System and method for providing lightSAMSUNG ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
- 1642US9678020B2Apparatus and method for inspection of substrate defectSONG JOON-SEO·Filed 2015·Granted Jun 13, 2017·0 cites·17 claims
- 1736US2016261786A1Wafer Inspection Apparatus Using Three-Dimensional ImageSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 1834US2016189369A1Method and system for detecting defectsSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →