Inventor · disambiguated record
Wolf Naetar
Also filed as: NAETAR WOLF
5 granted patents·3 pending applications·25 citations·filing 2018–2024
74Inventor score
Files withIMS NANOFABRICATION GMBH8
Top patents by PatentIndex Score
8 records- 0193US10522329B2Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatusIMS NANOFABRICATION GMBH·Filed 2018·Granted Dec 31, 2019·13 cites·14 claims
- 0290US10651010B2Non-linear dose- and blur-dependent edge placement correctionIMS NANOFABRICATION GMBH·Filed 2019·Granted May 12, 2020·7 cites·10 claims
- 0389US11099482B2Adapting the duration of exposure slots in multi-beam writersIMS NANOFABRICATION GMBH·Filed 2020·Granted Aug 24, 2021·3 cites·15 claims
- 0476US11569064B2Method for irradiating a target using restricted placement gridsIMS NANOFABRICATION GMBH·Filed 2018·Granted Jan 31, 2023·2 cites·22 claims
- 0559US2024427254A1Determination of Imaging Transfer Function of a Charged-Particle Exposure Apparatus Using Isofocal Dose MeasurementsIMS NANOFABRICATION GMBH·Filed 2024·Application pending·0 cites
- 0659US2024304415A1Method for Determining Focal Properties in a Target Beam Field of a Multi-Beam Charged-Particle Processing ApparatusIMS NANOFABRICATION GMBH·Filed 2024·Application pending·0 cites
- 0757US2023296989A1Correction of Thermal Expansion in a Lithographic DeviceIMS NANOFABRICATION GMBH·Filed 2023·Application pending·0 cites
- 0848US12481214B2Correction of blur variation in a multi-beam writerIMS NANOFABRICATION GMBH·Filed 2021·Granted Nov 25, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →