Inventor · disambiguated record
Woo Sik Yoo
Also filed as: YOO WOO S · YOO WOO SIK
52 granted patents·16 pending applications·1,149 citations·filing 1999–2007
99Inventor score
Top patents by PatentIndex Score
68 records- 0195US7276457B2Selective heating using flash annealWAFERMASTERS INC·Filed 2005·Granted Oct 2, 2007·26 cites·15 claims
- 0295US6376806B2Flash annealFiled 2001·Granted Apr 23, 2002·126 cites·34 claims
- 0394US6271459B1Heat management in wafer processing equipment using thermoelectric deviceWAFERMASTERS INC·Filed 2000·Granted Aug 7, 2001·86 cites·19 claims
- 0492US7198677B2Low temperature wafer backside cleaningWAFERMASTERS INC·Filed 2005·Granted Apr 3, 2007·23 cites·8 claims
- 0590US6516244B1Wafer alignment system and methodWAFERMASTERS INC·Filed 2000·Granted Feb 4, 2003·59 cites·7 claims
- 0689US6591161B2Method for determining robot alignmentWAFERMASTERS INC·Filed 2001·Granted Jul 8, 2003·55 cites·25 claims
- 0789US6379073B1Adjustable joint for a positionable armWAFERMASTERS INC·Filed 2000·Granted Apr 30, 2002·69 cites·5 claims
- 0888US6932561B2Power generation systemWAFERMASTERS INC·Filed 2003·Granted Aug 23, 2005·39 cites·11 claims
- 0986US7599048B2Optical emission spectroscopy process monitoring and material characterizationWAFERMASTERS INC·Filed 2007·Granted Oct 6, 2009·11 cites·32 claims
- 1086US7362426B1Raman and photoluminescence spectroscopyWAFERMASTERS INC·Filed 2006·Granted Apr 22, 2008·11 cites·20 claims
- 1185US7194199B2Stacked annealing systemWAFERMASTERS INC·Filed 2005·Granted Mar 20, 2007·8 cites·7 claims
- 1285US6394523B1Portable enclosure for semiconductor processingWAFERMASTERS INC·Filed 2000·Granted May 28, 2002·37 cites·16 claims
- 1384US6911376B2Selective heating using flash annealWAFERMASTERS·Filed 2003·Granted Jun 28, 2005·29 cites·15 claims
- 1482US6887803B2Gas-assisted rapid thermal processingWAFERMASTERS INC·Filed 2001·Granted May 3, 2005·24 cites·8 claims
- 1582US6602797B2Wafer processing methodWAFERMASTERS INC·Filed 2002·Granted Aug 5, 2003·24 cites·6 claims
- 1682US6240729B1Converting thermal energy to mechanical motionWAFERMASTERS INC·Filed 2000·Granted Jun 5, 2001·30 cites·20 claims
- 1781US7440094B2Optical sample characterization systemWAFERMASTERS INC·Filed 2005·Granted Oct 21, 2008·8 cites·4 claims
- 1881US7262918B1Light beam conditionerWAFERMASTERS INC·Filed 2006·Granted Aug 28, 2007·12 cites·24 claims
- 1980US7507667B2Selective heating using flash annealWAFERMASTERS INC·Filed 2007·Granted Mar 24, 2009·5 cites·20 claims
- 2080US6410455B1Wafer processing systemWAFERMASTERS INC·Filed 1999·Granted Jun 25, 2002·50 cites·11 claims
- 2179US6809035B2Hot plate annealingWAFERMASTERS INC·Filed 2002·Granted Oct 26, 2004·23 cites·20 claims
- 2278US7816152B2In situ, ex situ and inline process monitoring, optimization and fabricationWAFERMASTER INC·Filed 2007·Granted Oct 19, 2010·7 cites·12 claims
- 2376US7718554B2Focused laser beam processingWAFERMASTERS INC·Filed 2007·Granted May 18, 2010·5 cites·25 claims
- 2474US6568899B1Wafer processing system including a robotWAFERMASTERS INC·Filed 1999·Granted May 27, 2003·45 cites·4 claims
- 2573US7564547B2Spectroscopy systemWAFERMASTERS INC·Filed 2005·Granted Jul 21, 2009·7 cites·35 claims
- 2673US6737361B2Method for H2 Recycling in semiconductor processing systemWAFERMASTER INC·Filed 2001·Granted May 18, 2004·21 cites·14 claims
- 2772US6345150B1Single wafer annealing ovenWAFERMASTERS INC·Filed 1999·Granted Feb 5, 2002·41 cites·24 claims
- 2871US7397561B2Spectroscopy systemWAFERMASTERS INC·Filed 2006·Granted Jul 8, 2008·6 cites·21 claims
- 2971US6952889B2Forced convection assisted rapid thermal furnaceWAFERMASTERS INC·Filed 2002·Granted Oct 11, 2005·14 cites·18 claims
- 3071US6879778B2Batch furnaceWAFERMASTERS INC·Filed 2002·Granted Apr 12, 2005·13 cites·18 claims
- 3171US6790475B2Source gas deliveryWAFERMASTERS INC·Filed 2002·Granted Sep 14, 2004·9 cites·23 claims
- 3270US6897162B2Integrated ashing and implant annealing methodWAFERMASTERS INC·Filed 2003·Granted May 24, 2005·10 cites·18 claims
- 3370US6727194B2Wafer batch processing system and methodWAFERMASTERS INC·Filed 2002·Granted Apr 27, 2004·11 cites·5 claims
- 3468US6575739B1Configurable wafer furnaceWAFERMASTERS INC·Filed 2002·Granted Jun 10, 2003·12 cites·13 claims
- 3568US6212088B1Modular voltage adapter and method for using sameWAFERMASTERS INC·Filed 1999·Granted Apr 3, 2001·36 cites·20 claims
- 3667US7358200B2Gas-assisted rapid thermal processingWAFERMASTERS INC·Filed 2004·Granted Apr 15, 2008·9 cites·24 claims
- 3767US6862404B1Focused photon energy heating chamberWAFERMASTERS·Filed 2003·Granted Mar 1, 2005·12 cites·18 claims
- 3867US6500737B1System and method for providing defect free rapid thermal processingWAFERMASTERS INC·Filed 2000·Granted Dec 31, 2002·11 cites·25 claims
- 3966US6303906B1Resistively heated single wafer furnaceWAFERMASTERS INC·Filed 1999·Granted Oct 16, 2001·31 cites·18 claims
- 4065US6633132B2Plasma gereration apparatus and methodWAFERMASTERS INC·Filed 2001·Granted Oct 14, 2003·10 cites·14 claims
- 4163US6395648B1Wafer processing systemWAFERMASTERS INC·Filed 2000·Granted May 28, 2002·7 cites·4 claims
- 4263US6349546B1Liquid gas exchangerWAFERMASTERS INC·Filed 2000·Granted Feb 26, 2002·14 cites·38 claims
- 4360US6246031B1Mini batch furnaceWAFERMASTERS INC·Filed 1999·Granted Jun 12, 2001·24 cites·24 claims
- 4458US6698718B2Rotary valveWAFERMASTERS INC·Filed 2001·Granted Mar 2, 2004·8 cites·18 claims
- 4557US6621943B1System and method for converting analog data to digital dataWAFERMASTERS INC·Filed 2000·Granted Sep 16, 2003·7 cites·14 claims
- 4653US6500264B2Continuous thermal evaporation systemWAFERMASTERS INC·Filed 2001·Granted Dec 31, 2002·1 cites·21 claims
- 4750US2008251111A1Thermoelectric energy conversionYOO WOO SIK·Filed 2007·Application pending·0 cites
- 4849US7063583B2Multi-spectral uniform light sourceWAFERMASTERS INC·Filed 2001·Granted Jun 20, 2006·1 cites·12 claims
- 4949US2005028735A1Source gas deliveryFiled 2004·Application pending·0 cites
- 5048US7141513B2Integrated ashing and implant annealing method using ozoneWAFERMASTERS INC·Filed 2004·Granted Nov 28, 2006·1 cites·34 claims
Showing the top 50 of 68 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →