Inventor · disambiguated record
Xavier Colonna De Lega
Also filed as: DE LEGA COLONNA · DE LEGA XAVIER C · DE LEGA XAVIER COLONNA
39 granted patents·2 pending applications·1,710 citations·filing 1998–2010
99Inventor score
Top patents by PatentIndex Score
41 records- 0198US7428057B2Interferometer for determining characteristics of an object surface, including processing and calibrationZYGO CORP·Filed 2006·Granted Sep 23, 2008·75 cites·48 claims
- 0298US7324210B2Scanning interferometry for thin film thickness and surface measurementsZYGO CORP·Filed 2004·Granted Jan 29, 2008·103 cites·35 claims
- 0398US6195168B1Infrared scanning interferometry apparatus and methodZYGO CORP·Filed 2000·Granted Feb 27, 2001·180 cites·51 claims
- 0497US7446882B2Interferometer for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 4, 2008·45 cites·25 claims
- 0597US7324214B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2006·Granted Jan 29, 2008·102 cites·56 claims
- 0697US7142311B2Methods and systems for determining optical properties using low-coherence interference signalsZYGO CORP·Filed 2005·Granted Nov 28, 2006·33 cites·13 claims
- 0797US7106454B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2004·Granted Sep 12, 2006·87 cites·71 claims
- 0897US7012700B2Interferometric optical systems having simultaneously scanned optical path length and focusZYGO CORP·Filed 2003·Granted Mar 14, 2006·138 cites·49 claims
- 0997US6714307B2Measurement of complex surface shapes using a spherical wavefrontZYGO CORP·Filed 2002·Granted Mar 30, 2004·92 cites·89 claims
- 1096US7616323B2Interferometer with multiple modes of operation for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 10, 2009·37 cites·67 claims
- 1196US7304747B2Methods and systems for determining optical properties using low-coherence interference signalsZYGO CORP·Filed 2006·Granted Dec 4, 2007·28 cites·20 claims
- 1296US7239398B2Profiling complex surface structures using height scanning interferometryZYGO CORP·Filed 2006·Granted Jul 3, 2007·36 cites·20 claims
- 1396US6822745B2Optical systems for measuring form and geometric dimensions of precision engineered partsZYGO CORP·Filed 2001·Granted Nov 23, 2004·97 cites·47 claims
- 1495US7619746B2Generating model signals for interferometryZYGO CORP·Filed 2007·Granted Nov 17, 2009·36 cites·54 claims
- 1594US7684049B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2008·Granted Mar 23, 2010·18 cites·10 claims
- 1693US8379218B2Fiber-based interferometer system for monitoring an imaging interferometerZYGO CORP·Filed 2009·Granted Feb 19, 2013·20 cites·35 claims
- 1793US7948636B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2010·Granted May 24, 2011·17 cites·39 claims
- 1893US7271918B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2004·Granted Sep 18, 2007·57 cites·83 claims
- 1993US7046371B2Interferometer having a coupled cavity geometry for use with an extended sourceZYGO CORP·Filed 2003·Granted May 16, 2006·63 cites·47 claims
- 2093US6597460B2Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datumZYGO CORP·Filed 2001·Granted Jul 22, 2003·78 cites·30 claims
- 2192US7884947B2Interferometry for determining characteristics of an object surface, with spatially coherent illuminationZYGO CORP·Filed 2007·Granted Feb 8, 2011·26 cites·47 claims
- 2292US7292346B2Triangulation methods and systems for profiling surfaces through a thin film coatingZYGO CORP·Filed 2004·Granted Nov 6, 2007·27 cites·15 claims
- 2390US8126677B2Analyzing surface structure using scanning interferometryDE GROOT PETER·Filed 2008·Granted Feb 28, 2012·22 cites·33 claims
- 2490US7978338B2Compound reference interferometerZYGO CORP·Filed 2009·Granted Jul 12, 2011·14 cites·19 claims
- 2589US7636168B2Interferometry method and system including spectral decompositionZYGO CORP·Filed 2006·Granted Dec 22, 2009·20 cites·58 claims
- 2688US7466429B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2007·Granted Dec 16, 2008·14 cites·30 claims
- 2788US7102761B2Scanning interferometryZYGO CORP·Filed 2004·Granted Sep 5, 2006·39 cites·35 claims
- 2886US7030996B2Measurement of complex surface shapes using a spherical wavefrontZYGO CORP·Filed 2004·Granted Apr 18, 2006·21 cites·29 claims
- 2985US8248617B2Interferometer for overlay measurementsDE GROOT PETER·Filed 2009·Granted Aug 21, 2012·15 cites·24 claims
- 3083US8189202B2Interferometer for determining overlay errorsLIESENER JAN·Filed 2009·Granted May 29, 2012·12 cites·46 claims
- 3182US7289224B2Low coherence grazing incidence interferometry for profiling and tilt sensingZYGO CORP·Filed 2004·Granted Oct 30, 2007·16 cites·46 claims
- 3279US7978337B2Interferometer utilizing polarization scanningZYGO CORP·Filed 2008·Granted Jul 12, 2011·8 cites·49 claims
- 3378US6072581AGeometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capabilityZYGO CORP·Filed 1998·Granted Jun 6, 2000·47 cites·32 claims
- 3477US7023562B2Characterization of period variations in diffraction gratingsZYGO CORP·Filed 2002·Granted Apr 4, 2006·17 cites·31 claims
- 3576US6226092B1Full-field geometrically desensitized interferometer using refractive opticsZYGO CORP·Filed 1999·Granted May 1, 2001·40 cites·31 claims
- 3675US7889355B2Interferometry for lateral metrologyZYGO CORP·Filed 2007·Granted Feb 15, 2011·7 cites·35 claims
- 3772US7952724B2Interferometer with multiple modes of operation for determining characteristics of an object surfaceZYGO CORP·Filed 2009·Granted May 31, 2011·4 cites·23 claims
- 3869US7126698B2Measurement of complex surface shapes using a spherical wavefrontZYGO CORP·Filed 2006·Granted Oct 24, 2006·4 cites·42 claims
- 3963US7212291B2Interferometric microscopy using reflective optics for complex surface shapesZYGO CORP·Filed 2004·Granted May 1, 2007·15 cites·30 claims
- 4046US2008278730A1Methods and systems for determining optical propertis using low coherence interference signalsZYGO CORP·Filed 2007·Application pending·0 cites
- 4139US2006012582A1Transparent film measurementsDE LEGA XAVIER C·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →