Inventor · disambiguated record

Xia Man

Also filed as: MAN XIA

1 granted patent·0 citations·filing 2016–2016

5Inventor score

Technology areasH10P

Files withLAM RES AG1

Top patents by PatentIndex Score

1 record

0133US10483010B2Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environmentLAM RES AG·Filed 2016·Granted Nov 19, 2019·0 cites·19 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →