Inventor · disambiguated record

Yasuaki Amano

Also filed as: AMANO YASUAKI

1 granted patent·2 citations·filing 2018–2018

18Inventor score

Technology areasH10P

Files withSUSS MICROTEC LITHOGRAPHY GMBH1

Top patents by PatentIndex Score

1 record

0167US10937681B2Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask alignerSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2018·Granted Mar 2, 2021·2 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →