Inventor · disambiguated record
Ya-Lun Chen
Also filed as: Chen ya-lun
3 granted patents·3 pending applications·2 citations·filing 2014–2024
51Inventor score
Top patents by PatentIndex Score
6 records- 0189US11901189B2Ambient controlled two-step thermal treatment for spin-on coating layer planarizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 13, 2024·2 cites·20 claims
- 0274US2024387188A1Ambient controlled two-step thermal treatment for spin-on coating layer planarizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0371US12087592B2Ambient controlled two-step thermal treatment for spin-on coating layer planarizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0457US2023161240A1Manufacturing method of euv photo masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0554US2023146910A1Methods and compositions for improved patterning of photoresistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0643US9575041B2Gas cross-sensitivity analysis method and system thereofAUTOMOTIVE RES & TESTING CT·Filed 2014·Granted Feb 21, 2017·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →