Inventor · disambiguated record
Yao-Tian Chow
Also filed as: CHOW YAO-TIAN
2 granted patents·1 citations·filing 2006–2006
31Inventor score
Technology areasB81C
Files withTOUCH MICRO SYSTEM TECH2
Top patents by PatentIndex Score
2 records- 0152US7456043B2Method of fabricating microphone device and thermal oxide layer and low-stress structural layer thereofTOUCH MICRO SYSTEM TECH·Filed 2006·Granted Nov 25, 2008·1 cites·9 claims
- 0231US7410821B2Method of fabricating suspended structureTOUCH MICRO SYSTEM TECH·Filed 2006·Granted Aug 12, 2008·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →