Inventor · disambiguated record

Yang-Suk Han

Also filed as: HAN YANG-SUK

0 granted patents·2 pending applications·0 citations·filing 2008–2008

Technology areasC23C Y10T

Files withAIR PROD & CHEM2

Top patents by PatentIndex Score

2 records

0157US2008318443A1Plasma enhanced cyclic deposition method of metal silicon nitride filmAIR PROD & CHEM·Filed 2008·Application pending·0 cites
0244US2009130414A1Preparation of A Metal-containing Film Via ALD or CVD ProcessesAIR PROD & CHEM·Filed 2008·Application pending·0 cites

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