Inventor · disambiguated record

Yasuko Hari

Also filed as: HARI YASUKO

1 granted patent·7 citations·filing 2009–2009

29Inventor score

Technology areasC23C

Files withITAGAKI KATSUNORI1

Top patents by PatentIndex Score

1 record

0170US8137519B2Sputtering cathode, sputtering apparatus provided with sputtering cathode, film-forming method, and method for manufacturing electronic deviceITAGAKI KATSUNORI·Filed 2009·Granted Mar 20, 2012·7 cites·6 claims

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