Inventor · disambiguated record
Yanghua He
Also filed as: HE YANGHUA
4 granted patents·2 pending applications·21 citations·filing 2002–2007
72Inventor score
Files withTEXAS INSTRUMENTS INC5
Top patents by PatentIndex Score
6 records- 0168US8002611B2Chemical mechanical polishing pad having improved groove patternTEXAS INSTRUMENTS INC·Filed 2007·Granted Aug 23, 2011·5 cites·14 claims
- 0249US6913527B2Edge-sealed pad for CMP processTEXAS INSTRUMENTS INC·Filed 2004·Granted Jul 5, 2005·9 cites·4 claims
- 0345US7871931B2Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the sameTEXAS INSTRUMENTS INC·Filed 2005·Granted Jan 18, 2011·0 cites·22 claims
- 0445US6783437B1Edge-sealed pad for CMP processTEXAS INSTRUMENTS INC·Filed 2003·Granted Aug 31, 2004·7 cites·12 claims
- 0535US2007042509A1Detecting endpoint using luminescence in the fabrication of a microelectronics deviceTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
- 0630US2004099375A1Edge-contact ring for a wafer pedestalFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →