Inventor · disambiguated record
Yasuyoshi Imai
Also filed as: IMAI YASUYOSHI
2 granted patents·3 pending applications·11 citations·filing 2004–2006
55Inventor score
Technology areasH10P
Files withNGK INSULATORS LTD5
Top patents by PatentIndex Score
5 records- 0161US7416793B2Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the sameNGK INSULATORS LTD·Filed 2004·Granted Aug 26, 2008·8 cites·22 claims
- 0249US7353979B2Method of fabricating substrate placing stageNGK INSULATORS LTD·Filed 2004·Granted Apr 8, 2008·3 cites·9 claims
- 0340US2006213900A1Electrostatic chuck and method of manufacturing electrostatic chuckNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
- 0438US2006021705A1Substrate mounting apparatus and control method of substrate temperatureNGK INSULATORS LTD·Filed 2005·Application pending·0 cites
- 0536US2007217117A1Electrostatic chuck and producing method thereofNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →