Inventor · disambiguated record
Yasuhiro Kaga
Also filed as: KAGA YASUHIRO
5 granted patents·105 citations·filing 1991–2007
82Inventor score
Files withTOSHIBA KK5
Top patents by PatentIndex Score
5 records- 0178US7512501B2Defect inspecting apparatus for semiconductor waferTOSHIBA KK·Filed 2007·Granted Mar 31, 2009·7 cites·20 claims
- 0275US5161201AMethod of and apparatus for measuring pattern profileTOSHIBA KK·Filed 1991·Granted Nov 3, 1992·37 cites·3 claims
- 0371US5576542ASubstrate cross-section observing apparatusTOSHIBA KK·Filed 1994·Granted Nov 19, 1996·26 cites·6 claims
- 0459US5159643AMethod and apparatus for measuring pattern dimensionTOSHIBA KK·Filed 1991·Granted Oct 27, 1992·21 cites·5 claims
- 0557US5302829AAutomatic focusing method for scanning electron microscopyTOSHIBA KK·Filed 1993·Granted Apr 12, 1994·14 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →