Inventor · disambiguated record
Yasunobu Kawauchi
Also filed as: KAWAUCHI YASUNOBU
6 granted patents·82 citations·filing 1977–1989
84Inventor score
Top patents by PatentIndex Score
6 records- 0168US4868395AElectron beam lithography system for delineating a desired pattern on a target by means of electron beamsTOSHIBA MACHINE CO LTD·Filed 1988·Granted Sep 19, 1989·16 cites·7 claims
- 0261US4138724AControl systems of ozonizer systemsTOKYO SHIBAURA ELECTRIC CO·Filed 1977·Granted Feb 6, 1979·18 cites·6 claims
- 0355US5121438AApparatus for inspecting articlesTOSHIBA MACHINE CO LTD·Filed 1989·Granted Jun 9, 1992·18 cites·3 claims
- 0443US4810095ALaser-beam, pattern drawing/inspecting apparatusTOSHIBA MACHINE CO LTD·Filed 1986·Granted Mar 7, 1989·12 cites·1 claims
- 0536US4600996AArrangement for inspecting circuit patterns drawn on a maskTOSHIBA MACHINE CO LTD·Filed 1983·Granted Jul 15, 1986·12 cites·12 claims
- 0634US4530064AExposure method utilizing an energy beamTOKYO SHIBAURA ELECTRIC CO·Filed 1982·Granted Jul 16, 1985·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →