Inventor · disambiguated record
Yasunari Motoki
Also filed as: MOTOKI YASUNARI
5 granted patents·155 citations·filing 1984–1996
82Inventor score
Files withFUJITSU LTD5
Top patents by PatentIndex Score
5 records- 0186US4938839AMethod of removing photoresist on a semiconductor waferFUJITSU LTD·Filed 1988·Granted Jul 3, 1990·50 cites·7 claims
- 0283US4987284ADownstream microwave plasma processing apparatus having an improved coupling structure between microwave plasmaFUJITSU LTD·Filed 1990·Granted Jan 22, 1991·52 cites·12 claims
- 0373US5364519AMicrowave plasma processing process and apparatusFUJITSU LTD·Filed 1993·Granted Nov 15, 1994·30 cites·1 claims
- 0468US4637146ASpin dryerFUJITSU LTD·Filed 1984·Granted Jan 20, 1987·22 cites·6 claims
- 0528USRE36224EMicrowave plasma processing process and apparatusFUJITSU LTD·Filed 1996·Granted Jun 8, 1999·1 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →