Inventor · disambiguated record
Yasushi Obara
Also filed as: OBARA YASUSHI
2 granted patents·3 pending applications·8 citations·filing 1997–2019
46Inventor score
Top patents by PatentIndex Score
5 records- 0140US6129776AOperation method of vertical furnaceNIPPON STEEL CORP·Filed 1997·Granted Oct 10, 2000·8 cites·9 claims
- 0236US11145492B2Local dry etching apparatusSPEEDFAM CO LTD·Filed 2019·Granted Oct 12, 2021·0 cites·8 claims
- 0334US2016203989A1Local dry etching apparatus and local dry etching fabrication methodSPEEDFAM CO LTD·Filed 2014·Application pending·0 cites
- 0427US2017278674A1Local dry etching apparatusSPEEDFAM CO LTD·Filed 2017·Application pending·0 cites
- 0524US2016104601A1Local dry etching apparatusSPEEDFAM CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →