Inventor · disambiguated record
Yasuhisa Tani
Also filed as: TANI YASUHISA
2 granted patents·3 pending applications·6 citations·filing 2006–2013
48Inventor score
Top patents by PatentIndex Score
5 records- 0174US8035797B2Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Oct 11, 2011·6 cites·27 claims
- 0240US8724076B2Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing methodTANI YASUHISA·Filed 2011·Granted May 13, 2014·0 cites·15 claims
- 0337US2009244507A1Optical member, light routing unit, and exposure apparatusNIKON CORP·Filed 2009·Application pending·0 cites
- 0435US2008117401A1Surface treatment method and surface treatment apparatus, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Application pending·0 cites
- 0532US2013201460A1Exposure method, exposure apparatus and cleaning methodNIKON CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →