Inventor · disambiguated record
Yanpo Zhao
Also filed as: ZHAO YANPO
3 granted patents·1 pending application·2 citations·filing 2014–2015
49Inventor score
Files withUNIV TSINGHUA4
Top patents by PatentIndex Score
4 records- 0163US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0243US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 0342US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 0434US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →