Inventor · disambiguated record
Yeongkwang Lee
Also filed as: LEE YEONGKWANG
4 granted patents·3 pending applications·7 citations·filing 2017–2024
65Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0185US10347468B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jul 9, 2019·5 cites·20 claims
- 0270US10522332B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Dec 31, 2019·1 cites·7 claims
- 0369US11289308B2Apparatus and method for processing substrate and method of manufacturing semiconductor device using the methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 29, 2022·1 cites·15 claims
- 0456US2025226247A1Semiconductor processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0549US2024203701A1Substrate processing apparatus and substrate processing methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0642US10553401B2Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 4, 2020·0 cites·16 claims
- 0736US2019198296A1Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the SameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →