Inventor · disambiguated record
Yen-Hao Liu
Also filed as: LIU YEN-HAO
4 granted patents·4 pending applications·2 citations·filing 2021–2024
62Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD8
Top patents by PatentIndex Score
8 records- 0195US11520246B1Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·2 cites·19 claims
- 0288US2025123576A1Systems for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0387US12210296B2Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·20 claims
- 0481US11953839B2Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 0576US2024383013A1Onsite cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0670US12420313B2Onsite cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 23, 2025·0 cites·20 claims
- 0755US2023393489A1Detection method of euv pellicle statusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0853US2024045323A1Reticle covering pellicle for photolithogrphy scannerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →