Inventor · disambiguated record
Yen-Shuo Su
Also filed as: SU YEN-SHUO
26 granted patents·6 pending applications·74 citations·filing 2003–2025
94Inventor score
Top patents by PatentIndex Score
32 records- 0196US9799721B2Integrated magnetic core inductor and methods of fabrications thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 24, 2017·21 cites·20 claims
- 0295US10461145B2Method for fabricating magnetic coreTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 29, 2019·5 cites·20 claims
- 0394US11860544B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 2, 2024·2 cites·20 claims
- 0494US11340531B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 24, 2022·3 cites·20 claims
- 0593US11720035B2Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 8, 2023·2 cites·20 claims
- 0692US12147166B2Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 19, 2024·1 cites·20 claims
- 0791US9840778B2Plasma chamber having an upper electrode having controllable valves and a method of using the sameSU YEN-SHUO·Filed 2012·Granted Dec 12, 2017·6 cites·20 claims
- 0889US11800626B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 24, 2023·1 cites·20 claims
- 0988US11675272B2Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 13, 2023·1 cites·20 claims
- 1087US10787742B2Control system for plasma chamber having controllable valve and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Sep 29, 2020·3 cites·20 claims
- 1186US11452197B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 20, 2022·2 cites·20 claims
- 1283US2024385542A1Mitigating long-term energy decay of laser devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1382US11490750B1Versatile tableware deviceSU YEN SHUO·Filed 2021·Granted Nov 8, 2022·3 cites·12 claims
- 1482US2024385540A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1581US12332571B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 17, 2025·0 cites·20 claims
- 1681US10170536B1Magnetic memory with metal oxide etch stop layer and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 1, 2019·4 cites·20 claims
- 1781US2025271769A1Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1878US12114412B2Shock wave visualization for extreme ultraviolet plasma optimizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 1977US12130555B2Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 2076US11821089B2Control system for plasma chamber having controllable valveTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 21, 2023·0 cites·20 claims
- 2176US2024369938A1Method and apparatus for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2274US12265336B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 1, 2025·0 cites·20 claims
- 2374US11133374B2Method for fabricating magnetic coreTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 2474US2022338333A1Euv light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2570US9887071B2Multi-zone EPD detectorsCHEN CHIEN AN·Filed 2011·Granted Feb 6, 2018·2 cites·20 claims
- 2667US6934143B2Metal-insulator-metal capacitor structureTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 23, 2005·18 cites·20 claims
- 2761US9893141B2Magnetic core, inductor, and method for fabricating the magnetic coreTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 13, 2018·0 cites·20 claims
- 2860US11979971B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 7, 2024·0 cites·15 claims
- 2952US11506986B2Thermal controlling method in lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 22, 2022·0 cites·20 claims
- 3052US11153959B2Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 19, 2021·0 cites·20 claims
- 3143US10264861B2Wind-proof umbrellaSU YEN SHUO·Filed 2017·Granted Apr 23, 2019·0 cites·5 claims
- 3238US2011059407A1Double patterning strategy for forming fine patterns in photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →