Inventor · disambiguated record
Yi-Ming Dai
Also filed as: DAI YI · DAI YI-MING
32 granted patents·8 pending applications·78 citations·filing 2003–2025
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD28TAIWAN SEMICONDUCTOR MFG8LIN TING-YU1TAIWAN SEMICONDUCTOR MFG CO IN1WENG FU-TIEN1
Top patents by PatentIndex Score
40 records- 0197US11823964B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 21, 2023·3 cites·20 claims
- 0286US2025305115A1Multi-functional shutter disk for thin film deposition chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0385US12344929B2Multi-functional shutter disk for thin film deposition chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 1, 2025·0 cites·20 claims
- 0483US10345716B2Metrology method in reticle transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 9, 2019·2 cites·20 claims
- 0582US2025293064A1Method for depositing target material in deposition chamber with tiltable workpiece holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0680US12033965B2Semiconductor device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 9, 2024·0 cites·20 claims
- 0780US2024392464A1Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0880US2025087536A1Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0979US12211756B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 28, 2025·0 cites·20 claims
- 1079US12176253B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·20 claims
- 1179US12104268B2Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 1, 2024·0 cites·20 claims
- 1279US11920237B2Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 1376US6849533B2Method for fabricating microelectronic product with attenuated bond pad corrosionTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Feb 1, 2005·25 cites·17 claims
- 1475US12368066B2System and method for correcting non-ideal wafer topographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 22, 2025·0 cites·20 claims
- 1575US12341042B2Method for depositing target material in deposition chamber with tiltable workpiece holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 1675US7372497B2Effective method to improve sub-micron color filter sensitivityTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted May 13, 2008·23 cites·37 claims
- 1774US7507598B2Image sensor fabrication method and structureTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Mar 24, 2009·6 cites·12 claims
- 1872US11682639B2Semiconductor device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 20, 2023·0 cites·20 claims
- 1971US11732379B2Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 22, 2023·0 cites·20 claims
- 2069US11367644B2System and method for correcting non-ideal wafer topographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
- 2169US7655363B2Method and apparatus for solving mask precipitated defect issueTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Feb 2, 2010·2 cites·17 claims
- 2268US11728226B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 15, 2023·0 cites·20 claims
- 2368US6956253B2Color filter with resist material in scribe linesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Oct 18, 2005·13 cites·8 claims
- 2464US11492700B2Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 2563US11742231B2Movable wafer holder for film deposition chamber having six degrees of freedomTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 29, 2023·0 cites·20 claims
- 2662US11387123B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 2762US11075179B2Semiconductor device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 2858US10770327B2System and method for correcting non-ideal wafer topographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 8, 2020·0 cites·20 claims
- 2957US9707571B2Apparatus and method for supplying chemical solution on semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 18, 2017·1 cites·20 claims
- 3054US2022356578A1System and method for monitoring and performing thin film depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3153US10651066B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 12, 2020·0 cites·20 claims
- 3252US11081341B2Apparatus for fabricating a semiconductor device with target sputtering and target sputtering method for fabricating the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 3, 2021·0 cites·20 claims
- 3352US7402362B2Method and system for reducing and monitoring precipitated defects on masking reticlesTAIWAN SEMICONDUCTOR MFG CO IN·Filed 2004·Granted Jul 22, 2008·3 cites·25 claims
- 3451US8129762B2Image sensorWENG FU-TIEN·Filed 2008·Granted Mar 6, 2012·0 cites·21 claims
- 3542US8048589B2Phase shift photomask performance assurance methodTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Nov 1, 2011·0 cites·20 claims
- 3641US7968258B2System and method for photolithography in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jun 28, 2011·0 cites·16 claims
- 3739US2006000109A1Method and apparatus for reducing spin-induced wafer chargingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 3838US2014178056A1Apparatus and method for baking substrateZHU MEINA·Filed 2012·Application pending·0 cites
- 3936US9811000B2Photolithography tool and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 7, 2017·0 cites·20 claims
- 4033US2006201848A1Method for reducing mask precipitation defectsLIN TING-YU·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →