Inventor · disambiguated record
You-Feng Chen
Also filed as: Chen you-feng
6 granted patents·1 pending application·9 citations·filing 2013–2024
75Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD7
Top patents by PatentIndex Score
7 records- 0183US11742227B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 29, 2023·2 cites·20 claims
- 0282US9919350B2Cup-wash device, semiconductor apparatus, and cup cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 20, 2018·3 cites·18 claims
- 0381US12087602B2Wafer cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0481US2024371667A1Wafer cleaning systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0574US10074547B2Photoresist nozzle device and photoresist supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 11, 2018·3 cites·12 claims
- 0667US10515833B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 24, 2019·1 cites·19 claims
- 0743US9892982B2Method for controlling exhaust flow in wafer processing moduleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 13, 2018·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →