Inventor · disambiguated record
Yoshikuni Goshima
Also filed as: GOSHIMA YOSHIKUNI
8 granted patents·3 pending applications·11 citations·filing 2009–2024
77Inventor score
Top patents by PatentIndex Score
11 records- 0180US10714311B2Individual beam detector for multiple beams, multi-beam irradiation apparatus, and individual beam detection method for multiple beamsNUFLARE TECHNOLOGY INC·Filed 2018·Granted Jul 14, 2020·2 cites·12 claims
- 0265US7898447B2Methods and systems for testing digital-to-analog converter/amplifier circuitsNUFLARE TECHNOLOGY INC·Filed 2009·Granted Mar 1, 2011·7 cites·23 claims
- 0364US7989777B2Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifierNUFLARE TECHNOLOGY INC·Filed 2009·Granted Aug 2, 2011·2 cites·10 claims
- 0464US2025095948A1Electronic component and charged particle beam irradiation apparatusNUFLARE TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 0560US11355302B2Multi-beam blanking device and multi-charged-particle-beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2021·Granted Jun 7, 2022·0 cites·11 claims
- 0657US2023402253A1Multi charged particle beam evaluation method, multi charged particle beam writing method, inspection method for aperture array substrate for multi charged particle beam irradiation apparatus, and computer-readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 0755US11721520B2Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Granted Aug 8, 2023·0 cites·15 claims
- 0847US2024055218A1Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2021·Application pending·0 cites
- 0946US10607908B2Semiconductor deviceNUFLARE TECHNOLOGY INC·Filed 2018·Granted Mar 31, 2020·0 cites·15 claims
- 1045US8258491B2Pattern writing system and parameters monitoring method for pattern writing apparatusGOSHIMA YOSHIKUNI·Filed 2009·Granted Sep 4, 2012·0 cites·9 claims
- 1133US8427919B2Pattern writing system and method and abnormality diagnosing methodGOSHIMA YOSHIKUNI·Filed 2011·Granted Apr 23, 2013·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →