Inventor · disambiguated record
Yoshinobu Goto
Also filed as: GOTO YOSHINOBU
45 granted patents·7 pending applications·322 citations·filing 1997–2025
98Inventor score
Top patents by PatentIndex Score
52 records- 0197US11161257B2RobotSEIKO EPSON CORP·Filed 2020·Granted Nov 2, 2021·6 cites·7 claims
- 0295US7189946B2Substrate heating deviceNGK INSULATORS LTD·Filed 2005·Granted Mar 13, 2007·30 cites·13 claims
- 0394US7247819B2Substrate heating apparatusNGK INSULATORS LTD·Filed 2005·Granted Jul 24, 2007·26 cites·19 claims
- 0489US7274006B2HeaterNGK INSULATORS LTD·Filed 2006·Granted Sep 25, 2007·16 cites·9 claims
- 0588USD782553SIndustrial robotSEIKO EPSON CORP·Filed 2016·Granted Mar 28, 2017·33 cites·1 claims
- 0688US8790007B2Semiconductor manufacturing apparatus memberGOTO YOSHINOBU·Filed 2012·Granted Jul 29, 2014·9 cites·10 claims
- 0787US7525071B2Power-supplying member and heating apparatus using the sameNGK INSULATORS LTD·Filed 2006·Granted Apr 28, 2009·12 cites·5 claims
- 0885US8684432B2Robot hand, robot, and holding mechanismSEIKO EPSON CORP·Filed 2013·Granted Apr 1, 2014·13 cites·20 claims
- 0984US12506028B2Member for semiconductor manufacturing apparatusNGK INSULATORS LTD·Filed 2025·Granted Dec 23, 2025·0 cites·10 claims
- 1084US10940595B2RobotSEIKO EPSON CORP·Filed 2018·Granted Mar 9, 2021·5 cites·9 claims
- 1183US9597794B2RobotSEIKO EPSON CORP·Filed 2015·Granted Mar 21, 2017·5 cites·3 claims
- 1282US6875960B2Heating systemNGK INSULATORS LTD·Filed 2002·Granted Apr 5, 2005·28 cites·8 claims
- 1381US7126093B2Heating systemsNGK INSULATORS LTD·Filed 2005·Granted Oct 24, 2006·7 cites·15 claims
- 1480US8294069B2Heating device for heating a waferGOTO YOSHINOBU·Filed 2008·Granted Oct 23, 2012·7 cites·2 claims
- 1580US7044399B2Heating systemsNGK INSULATORS LTD·Filed 2003·Granted May 16, 2006·22 cites·12 claims
- 1679US8168926B2Heating deviceGOTO YOSHINOBU·Filed 2008·Granted May 1, 2012·6 cites·6 claims
- 1777US7679034B2Power-supplying member and heating apparatus using the sameNGK INSULATORS LTD·Filed 2006·Granted Mar 16, 2010·5 cites·9 claims
- 1875US11045961B2Robot and robot systemSEIKO EPSON CORP·Filed 2018·Granted Jun 29, 2021·1 cites·13 claims
- 1975US10046465B2Attaching and detaching device and robotSEIKO EPSON CORP·Filed 2014·Granted Aug 14, 2018·4 cites·16 claims
- 2073US8304701B2Ceramic heater and method for making the sameAKATSUKA YUJI·Filed 2010·Granted Nov 6, 2012·6 cites·10 claims
- 2173US7544916B2Heating deviceNGK INSULATORS LTD·Filed 2006·Granted Jun 9, 2009·4 cites·6 claims
- 2272US10391643B2RobotSEIKO EPSON CORP·Filed 2016·Granted Aug 27, 2019·2 cites·10 claims
- 2370US8336891B2Electrostatic chuckGOTO YOSHINOBU·Filed 2009·Granted Dec 25, 2012·3 cites·11 claims
- 2469US7401399B2Method of manufacturing a substrate heating deviceNGK INSULATORS LTD·Filed 2005·Granted Jul 22, 2008·3 cites·21 claims
- 2569US6997993B2Susceptor supporting constructionNGK INSULATORS LTD·Filed 2002·Granted Feb 14, 2006·12 cites·8 claims
- 2669US5941302ACeramic shell-and-tube type heat exchanger and method for manufacturing the sameNGK INSULATORS LTD·Filed 1997·Granted Aug 24, 1999·25 cites·6 claims
- 2767US8897918B2Robot hand and robotGOTO YOSHINOBU·Filed 2012·Granted Nov 25, 2014·4 cites·5 claims
- 2867US8794685B2Robot hand and robotMURAKAMI KENJIRO·Filed 2012·Granted Aug 5, 2014·4 cites·16 claims
- 2966US7173220B2Heating deviceNGK INSULATORS LTD·Filed 2005·Granted Feb 6, 2007·2 cites·2 claims
- 3065US7115839B2HeatersNGK INSULATORS LTD·Filed 2004·Granted Oct 3, 2006·9 cites·14 claims
- 3157US6979369B2Fixing structures and supporting structures of ceramic susceptors, and supporting members thereofNGK INSULATORS LTD·Filed 2003·Granted Dec 27, 2005·5 cites·13 claims
- 3255US7053339B2Ceramic heaterNGK INSULATORS LTD·Filed 2003·Granted May 30, 2006·5 cites·19 claims
- 3354US11745339B2Horizontal articulated robotSEIKO EPSON CORP·Filed 2020·Granted Sep 5, 2023·0 cites·10 claims
- 3450US9889555B2Robot SystemSEIKO EPSON CORP·Filed 2016·Granted Feb 13, 2018·0 cites·8 claims
- 3550US7022947B2Systems for supporting ceramic susceptorsNGK INSULATORS LTD·Filed 2004·Granted Apr 4, 2006·2 cites·8 claims
- 3650US2014138970A1Robot hand and robotSEIKO EPSON CORP·Filed 2014·Application pending·0 cites
- 3748US11077549B2Robot and robot systemSEIKO EPSON CORP·Filed 2018·Granted Aug 3, 2021·0 cites·10 claims
- 3848US10737399B2RobotSEIKO EPSON CORP·Filed 2018·Granted Aug 11, 2020·0 cites·6 claims
- 3948US8865291B2Plasma-resistant memberGOTO YOSHINOBU·Filed 2012·Granted Oct 21, 2014·0 cites·4 claims
- 4048US7157666B2Systems for producing semiconductors and members thereforNGK INSULATORS LTD·Filed 2004·Granted Jan 2, 2007·1 cites·16 claims
- 4148US2016371679A1Virtual currency transaction through payment cardGOTO YOSHINOBU·Filed 2016·Application pending·0 cites
- 4246US2012286536A1Robot hand and robotMURAKAMI KENJIRO·Filed 2012·Application pending·0 cites
- 4345US7432474B2Heating deviceNGK INSULATORS LTD·Filed 2007·Granted Oct 7, 2008·0 cites·7 claims
- 4445US2007215597A1Heating device and manufacturing method thereofNGK INSULATORS LTD·Filed 2007·Application pending·0 cites
- 4543US8748782B2Ceramic heaterGOTO YOSHINOBU·Filed 2011·Granted Jun 10, 2014·0 cites·12 claims
- 4642US8857876B1Robot hand, robot, and holding mechanismSEIKO EPSON CORP·Filed 2014·Granted Oct 14, 2014·0 cites·12 claims
- 4741US7332694B2Heating resistances and heatersNGK INSULATORS LTD·Filed 2004·Granted Feb 19, 2008·0 cites·3 claims
- 4840US7220320B2Systems for producing semiconductors and members thereforNGK INSULATORS LTD·Filed 2004·Granted May 22, 2007·0 cites·4 claims
- 4940US2018236671A1RobotSEIKO EPSON CORP·Filed 2018·Application pending·0 cites
- 5040US2005173412A1Systems for heating wafersNGK INSULATORS LTD·Filed 2004·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →