Inventor · disambiguated record
Young-Koog Han
Also filed as: HAN YOUNG-KOOG
3 granted patents·2 pending applications·39 citations·filing 1999–2006
69Inventor score
Top patents by PatentIndex Score
5 records- 0163US6501189B1Alignment mark of semiconductor wafer for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignment mark, and method of determining the aligned state of a wafer from the alignment markSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Dec 31, 2002·29 cites·4 claims
- 0261US7457058B2Optical element holder and projection exposure apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Nov 25, 2008·1 cites·17 claims
- 0358US7038777B2Semiconductor wafer bearing alignment mark for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignment mark, and method of determining the aligned state of a wafer from the alignment markSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted May 2, 2006·9 cites·2 claims
- 0439US2006148275A1Method of forming an alignment mark and manufacturing a semiconductor device using the sameHAN YOUNG-KOOG·Filed 2006·Application pending·0 cites
- 0539US2006118974A1Structure provided on an overlay region, overlay mark having the structure, and method of forming the overlay markKIM DAE-JOUNG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →