Inventor · disambiguated record
Yoshiaki Ikuta
Also filed as: IKUTA YOSHIAKI
40 granted patents·8 pending applications·385 citations·filing 1987–2016
98Inventor score
Top patents by PatentIndex Score
48 records- 0193US9268207B2Reflective mask blank for EUV lithography, method of manufacturing thereof, reflective mask for EUV lithography and method of manufacturing thereofASAHI GLASS CO LTD·Filed 2015·Granted Feb 23, 2016·6 cites·20 claims
- 0293US8241821B2Reflective mask blank for EUV lithography, process for producing the same and mask for EUV lithographyIKUTA YOSHIAKI·Filed 2011·Granted Aug 14, 2012·14 cites·24 claims
- 0392US10928721B2Reflective mask blank for EUV lithographyAGC INC·Filed 2016·Granted Feb 23, 2021·5 cites·17 claims
- 0491US6544914B1Synthetic quartz glass for optical member, process for producing the same, and method of using the sameASAHI GLASS CO LTD·Filed 2000·Granted Apr 8, 2003·29 cites·11 claims
- 0588US7960077B2Reflective-type mask blank for EUV lithographyASAHI GLASS CO LTD·Filed 2010·Granted Jun 14, 2011·11 cites·24 claims
- 0688US6475575B1Pellicle and method for manufacture thereofASAHI GLASS CO LTD·Filed 2000·Granted Nov 5, 2002·24 cites·15 claims
- 0787US6749053B2Bill handling machineGLORY KOGYO KK·Filed 2001·Granted Jun 15, 2004·45 cites·14 claims
- 0886US6576578B1Synthetic quartz glass and method for preparing the sameASAHI GLASS CO LTD·Filed 2000·Granted Jun 10, 2003·32 cites·12 claims
- 0986US6499317B1Synthetic quartz glass and method for production thereofASAHI GLASS CO LTD·Filed 1999·Granted Dec 31, 2002·32 cites·20 claims
- 1080US8916316B2Reflecting mask blank, method for manufacturing reflective mask blank and method for quality control for reflective mask blankASAHI GLASS CO LTD·Filed 2014·Granted Dec 23, 2014·3 cites·20 claims
- 1180US8053557B2SPARC-derived tumor rejection antigenic peptides and medicaments comprising the sameONCO THERAPY SCIENCE INC·Filed 2007·Granted Nov 8, 2011·4 cites·3 claims
- 1279US7678511B2Reflective-type mask blank for EUV lithographyASAHI GLASS CO LTD·Filed 2006·Granted Mar 16, 2010·6 cites·62 claims
- 1379US7527695B2Apparatus and method for cleaning substrateASAHI GLASS CO LTD·Filed 2006·Granted May 5, 2009·6 cites·9 claims
- 1477US7901843B2Process for smoothing surface of glass substrateASAHI GLASS CO LTD·Filed 2008·Granted Mar 8, 2011·5 cites·26 claims
- 1577US7549141B2Photomask, photomask manufacturing method, and photomask processing deviceASAHI GLASS CO LTD·Filed 2005·Granted Jun 16, 2009·6 cites·17 claims
- 1677US7514382B2Synthetic quartz glass for optical member and its production methodASAHI GLASS CO LTD·Filed 2006·Granted Apr 7, 2009·7 cites·5 claims
- 1776US7694797B2Printed note processing machine and systemGLORY KOGYO KK·Filed 2004·Granted Apr 13, 2010·14 cites·12 claims
- 1875US8580465B2Multilayer mirror for EUV lithography and process for its productionMIKAMI MASAKI·Filed 2012·Granted Nov 12, 2013·2 cites·11 claims
- 1974US8993201B2Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrateMIKAMI MASAKI·Filed 2012·Granted Mar 31, 2015·2 cites·20 claims
- 2074US7504185B2Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithographyASAHI GLASS CO LTD·Filed 2005·Granted Mar 17, 2009·5 cites·10 claims
- 2173US7592063B2Quartz glass substrate and process for its productionASAHI GLASS CO LTD·Filed 2006·Granted Sep 22, 2009·3 cites·16 claims
- 2272US8470968B2SPARC-derived tumor rejection antigenic peptides and medicaments comprising the sameNISHIMURA YASUHARU·Filed 2011·Granted Jun 25, 2013·1 cites·3 claims
- 2371US7230695B2Defect repair device and defect repair methodASAHI GLASS CO LTD·Filed 2004·Granted Jun 12, 2007·10 cites·31 claims
- 2471US6611317B1Exposure apparatus, semiconductor device, and photomaskASAHI GLASS CO LTD·Filed 2000·Granted Aug 26, 2003·11 cites·4 claims
- 2570US4756368AMethod for drawing up special crude oilMITSUBISHI HEAVY IND LTD·Filed 1987·Granted Jul 12, 1988·43 cites·3 claims
- 2669US4919207AMethod for drawing up special crude oilMITSUBISHI HEAVY IND LTD·Filed 1989·Granted Apr 24, 1990·39 cites·5 claims
- 2766US8921017B2Multilayer substrate, manufacturing method for multilayer substrate, and quality control method for multilayer substrateASAHI GLASS CO LTD·Filed 2013·Granted Dec 30, 2014·1 cites·20 claims
- 2866US7921859B2Method and apparatus for an in-situ ultraviolet cleaning toolSEMATECH INC·Filed 2005·Granted Apr 12, 2011·2 cites·17 claims
- 2966US7712333B2Method for smoothing a surface of a glass substrate for a reflective mask blank used in EUV lithographyASAHI GLASS CO LTD·Filed 2006·Granted May 11, 2010·2 cites·19 claims
- 3065US7022633B2Synthetic quartz glass and process for producing itASAHI GLASS CO LTD·Filed 2002·Granted Apr 4, 2006·6 cites·10 claims
- 3164US8017345B2Diagnostic kit for malignant melanomaUNIV KUMAMOTO·Filed 2005·Granted Sep 13, 2011·2 cites·5 claims
- 3263US8518613B2Optical member base material for EUV lithography, and method for producing sameNAKANISHI HIROSHI·Filed 2012·Granted Aug 27, 2013·1 cites·19 claims
- 3362US8052797B2Method for removing foreign matter from substrate surfaceASAHI GLASS CO LTD·Filed 2006·Granted Nov 8, 2011·1 cites·19 claims
- 3460US8251197B2Banknote deposit machine, processing system and methodTAKEUCHI HISASHI·Filed 2010·Granted Aug 28, 2012·1 cites·8 claims
- 3558US9120842B2SPARC-derived tumor rejection antigenic peptides and medicaments comprising the sameONCO THERAPY SCIENCE INC·Filed 2013·Granted Sep 1, 2015·0 cites·3 claims
- 3655US7368403B2Synthetic quartz glass for optical member, projection exposure apparatus and projection exposure methodASAHI GLASS CO LTD·Filed 2004·Granted May 6, 2008·4 cites·2 claims
- 3752US2007256703A1Method for removing contaminant from surface of glass substrateASAHI GLASS CO LTD·Filed 2006·Application pending·0 cites
- 3850US2011089612A1Tio2-containing quartz glass substrateASAHI GLASS CO LTD·Filed 2010·Application pending·0 cites
- 3949US8206510B2Method and apparatus for an in-situ ultraviolet cleaning toolRASTEGAR ABBAS·Filed 2011·Granted Jun 26, 2012·0 cites·17 claims
- 4049US2010234205A1TiO2-containing quartz glass substrateASAHI GLASS CO LTD·Filed 2010·Application pending·0 cites
- 4148US7784307B2Optical member made of synthetic quartz glass, and process for its productionASAHI GLASS CO LTD·Filed 2006·Granted Aug 31, 2010·0 cites·14 claims
- 4244US2001035361A1Container for an optical articleASAHI GLASS CO LTD·Filed 2001·Application pending·0 cites
- 4343US2005176572A1Synthetic quartz glassFiled 2003·Application pending·0 cites
- 4441US9739722B2Reflective mask blank for EUV lithography, and process for its inspection and process for its productionASAHI GLASS CO LTD·Filed 2015·Granted Aug 22, 2017·0 cites·12 claims
- 4539US2016168020A1Method of finishing pre-polished glass substrate surfaceASAHI GLASS CO LTD·Filed 2015·Application pending·0 cites
- 4638US8402786B2Synthetic silica glass optical component and process for its productionIKUTA YOSHIAKI·Filed 2002·Granted Mar 26, 2013·0 cites·7 claims
- 4735US2016041463A1Glass substrate for optical lithographyASAHI GLASS CO LTD·Filed 2015·Application pending·0 cites
- 4828US2016266482A1Glass substrate for mask blankASAHI GLASS CO LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →