Inventor · disambiguated record
Yoshinobu Kawata
Also filed as: KAWATA YOSHINOBU
4 granted patents·1 pending application·302 citations·filing 1988–2009
83Inventor score
Top patents by PatentIndex Score
5 records- 0191US5338363AChemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus thereforMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Aug 16, 1994·113 cites·21 claims
- 0288US4932353AChemical coating apparatusMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Jun 12, 1990·81 cites·8 claims
- 0377US5445677AApparatus for manufacturing semiconductor and method of manufacturing semiconductorMITSUBISHI ELECTRIC CORP·Filed 1994·Granted Aug 29, 1995·69 cites·13 claims
- 0460US5425812AReaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamberMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jun 20, 1995·39 cites·7 claims
- 0551US2010002334A1Spindle system, electromagnetic conversion property evaluating apparatus and information storage deviceFUJITSU LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →