Inventor · disambiguated record
Yoshika Kimura
Also filed as: KIMURA YOSHIKA
2 granted patents·23 citations·filing 1997–2000
60Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0169US6815142B1Method for forming resist pattern, and overlying layer material and semiconductor device used for forming resist patternRENESAS TECH CORP·Filed 2000·Granted Nov 9, 2004·12 cites·13 claims
- 0242US5679497AResist material and method for forming resist patternMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Oct 21, 1997·11 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →