Inventor · disambiguated record
Yoshihiro Komeyama
Also filed as: KOMEYAMA YOSHIHIRO
6 granted patents·258 citations·filing 1982–1986
86Inventor score
Files withHITACHI LTD6
Top patents by PatentIndex Score
6 records- 0194US4492356APrecision parallel translation systemHITACHI LTD·Filed 1982·Granted Jan 8, 1985·99 cites·11 claims
- 0290US4825453AX-ray exposure apparatusHITACHI LTD·Filed 1985·Granted Apr 25, 1989·59 cites·15 claims
- 0387US4614431AAlignment apparatus with optical length-varying optical systemHITACHI LTD·Filed 1984·Granted Sep 30, 1986·52 cites·8 claims
- 0476US4777641AMethod and apparatus for alignmentHITACHI LTD·Filed 1986·Granted Oct 11, 1988·27 cites·5 claims
- 0546US4516254AX-Ray lithographic apparatusHITACHI LTD·Filed 1983·Granted May 7, 1985·13 cites·6 claims
- 0644US4708484AProjection alignment method and apparatusHITACHI LTD·Filed 1985·Granted Nov 24, 1987·8 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →