Inventor · disambiguated record
Yoko Miyazaki
Also filed as: MIYAZAKI YOKO
13 granted patents·1 pending application·262 citations·filing 1991–2005
93Inventor score
Top patents by PatentIndex Score
14 records- 0184US6031607ASystem and method for inspecting pattern defectMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Feb 29, 2000·76 cites·20 claims
- 0283US7330265B2Appearance inspection apparatus and projection method for projecting image of sample under inspectionTOKYO SEIMITSU CO LTD·Filed 2005·Granted Feb 12, 2008·10 cites·6 claims
- 0375US6016562AInspection data analyzing apparatus for in-line inspection with enhanced display of inspection resultsMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Jan 18, 2000·49 cites·17 claims
- 0471US6437862B1Defect inspection apparatusMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Aug 20, 2002·35 cites·11 claims
- 0567US6528334B1Semiconductor inspection system, and method of manufacturing a semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Mar 4, 2003·10 cites·9 claims
- 0667US6295126B1Inspection apparatus for foreign matter and pattern defectMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Sep 25, 2001·6 cites·5 claims
- 0766US5289260APattern defect detection device and a spatial frequency filter used thereinMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Feb 22, 1994·25 cites·8 claims
- 0865US6344897B2Inspection apparatus for foreign matter and pattern defectMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Feb 5, 2002·5 cites·4 claims
- 0958US6400038B2Alignment method and semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Jun 4, 2002·5 cites·2 claims
- 1052US5170063AInspection device for detecting defects in a periodic pattern on a semiconductor waferMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Dec 8, 1992·15 cites·5 claims
- 1151US5379150AMethod of manufacturing a spatial frequency filter for use in a pattern defect detection deviceMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jan 3, 1995·13 cites·5 claims
- 1248US6551847B2Inspection analyzing apparatus and semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Apr 22, 2003·5 cites·16 claims
- 1342US6242318B1Alignment method and semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Jun 5, 2001·8 cites·12 claims
- 1437US2008024794A1Semiconductor Surface Inspection Apparatus and Method of IlluminationMIYAZAKI YOKO·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →