Inventor · disambiguated record
Yoshifumi Nakakoji
Also filed as: NAKAKOJI YOSHIFUMI
2 granted patents·4 citations·filing 2006–2017
47Inventor score
Technology areasG03F
Files withNIKON CORP2
Top patents by PatentIndex Score
2 records- 0172US10845720B2Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing methodNIKON CORP·Filed 2017·Granted Nov 24, 2020·2 cites·64 claims
- 0267US7466396B2Lithography apparatus and method utilizing pendulum interferometer systemNIKON CORP·Filed 2006·Granted Dec 16, 2008·2 cites·56 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →