Inventor · disambiguated record
Yohei Nawaki
Also filed as: NAWAKI Yohei
3 granted patents·3 pending applications·2 citations·filing 2015–2023
50Inventor score
Files withUSHIO ELECTRIC INC6
Top patents by PatentIndex Score
6 records- 0165US10101652B2Exposure method, method of fabricating periodic microstructure, method of fabricating grid polarizing element and exposure apparatusUSHIO ELECTRIC INC·Filed 2015·Granted Oct 16, 2018·2 cites·10 claims
- 0249US12261077B2Work stage and exposure apparatusUSHIO ELECTRIC INC·Filed 2023·Granted Mar 25, 2025·0 cites·7 claims
- 0349US11709301B2VUV polarizer, VUV polarization device, VUV polarization method and alignment methodUSHIO ELECTRIC INC·Filed 2019·Granted Jul 25, 2023·0 cites·6 claims
- 0449US2024069263A1Method of manufacturing optical component, apparatus of manufacturing optical component and optical componentUSHIO ELECTRIC INC·Filed 2022·Application pending·0 cites
- 0544US2020218148A1Method for forming a metal film, and nanoimprint lithography materialUSHIO ELECTRIC INC·Filed 2020·Application pending·0 cites
- 0624US2017017027A1Grid polarizer and photo-alignment deviceUSHIO ELECTRIC INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →