Inventor · disambiguated record
Yoshiyuki Nozawa
Also filed as: NOZAWA YOSHIYUKI
4 granted patents·3 pending applications·12 citations·filing 2004–2011
65Inventor score
Top patents by PatentIndex Score
7 records- 0179US8518283B2Plasma etching method capable of detecting end point and plasma etching device thereforYAMAMOTO TAKASHI·Filed 2007·Granted Aug 27, 2013·7 cites·9 claims
- 0251US7220678B2Method for etching of a silicon substrate and etching apparatusSUMITOMO PRECISION PROD CO·Filed 2004·Granted May 22, 2007·5 cites·4 claims
- 0351US2012006490A1Plasma Etching ApparatusYAMAMOTO TAKASHI·Filed 2009·Application pending·0 cites
- 0440US8546265B2Method, apparatus and program for manufacturing silicon structureNOZAWA YOSHIYUKI·Filed 2009·Granted Oct 1, 2013·0 cites·6 claims
- 0540US2007212888A1Silicon Substrate Etching MethodSUMITOMO PRECISION PROD CO·Filed 2007·Application pending·0 cites
- 0634US2004180544A1Silicon substrate etching method and etching apparatusSUMITOMO PRECISION PROD CO·Filed 2004·Application pending·0 cites
- 0728US8628676B2Plasma etching methodIKEMOTO NAOYA·Filed 2011·Granted Jan 14, 2014·0 cites·8 claims
Join the waitlist — get patent alerts
Get an alert when Yoshiyuki Nozawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →