Inventor · disambiguated record
Yoshiaki Onimaru
Also filed as: ONIMARU YOSHIAKI
4 granted patents·4 citations·filing 2006–2019
60Inventor score
Technology areasH01J
Files withNUFLARE TECHNOLOGY INC4
Top patents by PatentIndex Score
4 records- 0171US7476881B2Charged beam drawing apparatus and charged beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jan 13, 2009·3 cites·16 claims
- 0264US9953800B2Multi-charged particle beam writing apparatus and multi-charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Apr 24, 2018·1 cites·13 claims
- 0350US10475621B2Drawing device and drawing methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Nov 12, 2019·0 cites·12 claims
- 0446US10886103B2Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jan 5, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →