Inventor · disambiguated record
Yoshihisa Ooaeh
Also filed as: OOAEH YOSHIHISA
13 granted patents·332 citations·filing 1996–2001
94Inventor score
Files withFUJITSU LTD13
Top patents by PatentIndex Score
13 records- 0188US5854490ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1996·Granted Dec 29, 1998·46 cites·11 claims
- 0284US6242751B1Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1999·Granted Jun 5, 2001·33 cites·62 claims
- 0383US6420700B2Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 2001·Granted Jul 16, 2002·15 cites·16 claims
- 0480US5814423ATransmission mask for charged particle beam exposure apparatuses, and an exposure apparatus using such a transmission maskFUJITSU LTD·Filed 1996·Granted Sep 29, 1998·57 cites·22 claims
- 0579US5757015ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1996·Granted May 26, 1998·25 cites·22 claims
- 0676US5866300AMethod of and system for exposing pattern on object by charged particle beamFUJITSU LTD·Filed 1996·Granted Feb 2, 1999·25 cites·15 claims
- 0775US5969365ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Oct 19, 1999·20 cites·18 claims
- 0869US5981960ACharged particle beam exposure method and apparatus thereforFUJITSU LTD·Filed 1996·Granted Nov 9, 1999·36 cites·21 claims
- 0966US5949078ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1998·Granted Sep 7, 1999·16 cites·13 claims
- 1061US6055719AMethod for manufacturing an electrostatic deflectorFUJITSU LTD·Filed 1998·Granted May 2, 2000·22 cites·3 claims
- 1160US6057907AMethod of and system for exposing pattern on object by charged particle beamFUJITSU LTD·Filed 1998·Granted May 2, 2000·12 cites·3 claims
- 1259US5770862ACharged particle exposure apparatus, and a charged particle exposure methodFUJITSU LTD·Filed 1996·Granted Jun 23, 1998·20 cites·5 claims
- 1344US5872366ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Feb 16, 1999·5 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →