Inventor · disambiguated record

Youngchang Seo

Also filed as: SEO YOUNGCHANG

1 granted patent·0 citations·filing 2021–2021

9Inventor score

Technology areasG03F

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0159US12313979B2Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 27, 2025·0 cites·20 claims

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