Inventor · disambiguated record
Yoshiharu Shigyo
Also filed as: SHIGYO YOSHIHARU
6 granted patents·338 citations·filing 1993–2005
87Inventor score
Top patents by PatentIndex Score
6 records- 0193US5463459AMethod and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processHITACHI LTD·Filed 1993·Granted Oct 31, 1995·145 cites·39 claims
- 0291US7177020B2Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processRENESAS TECH CORP·Filed 2005·Granted Feb 13, 2007·15 cites·19 claims
- 0387US6542830B1Process control systemHITACHI LTD·Filed 1997·Granted Apr 1, 2003·93 cites·25 claims
- 0483US6757621B2Process management systemHITACHI LTD·Filed 2003·Granted Jun 29, 2004·35 cites·10 claims
- 0571US6894773B2Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processRENESAS TECH CORP·Filed 2001·Granted May 17, 2005·11 cites·27 claims
- 0670US6650409B1Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same systemHITACHI LTD·Filed 1996·Granted Nov 18, 2003·39 cites·49 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →